서지주요정보
Low pressure plasmas and microstructuring technology [electronic resource]
서명 / 저자 Low pressure plasmas and microstructuring technology [electronic resource] / by Gerhard Franz.
저자명 Franz, Gerhard.
단체명 Franz, Gerhard.
발행사항 Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2009.
Online Access http://dx.doi.org/10.1007/978-3-540-85849-2URL

서지기타정보

서지기타정보
청구기호 TA2020 .F837 2009
형태사항 xxiv, 732 p. : ill., digital ; 24 cm.
언어 English
주제 Plasma (Ionized gases) --Industrial applications.
Plasma engineering.
Plasma etching.
Optical and Electronic Materials.
Material Science.
Atomic and Molecular Structure and Spectra.
Surfaces and Interfaces, Thin Films.
Electronics and Microelectronics, Instrumentation.
보유판 및 특별호 저록 Springer eBooks
ISBN 9783540858492 (electronic bk.) 9783540858485 (paper)
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