| 청구기호 |
TA2020 .G75 1994eb |
| 형태사항 |
1 PDF (xiii, 257 pages) : illustrations.
|
| 언어 |
English |
| 서지주기 |
Includes bibliographical references and index.
|
| 내용 |
1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
|
| 주제 |
Plasma engineering.
Low temperature plasmas.
Manufacturing processes.
|
| ISBN |
9780470544273 |
| 기타 표준번호 |
10.1109/9780470544273 |
