| 청구기호 |
TK7874 .W635s 1986 |
| 형태사항 |
v.<1-3> : ill. ; 25 cm
|
| 언어 |
English |
| 서지주기 |
Includes bibliographical and indexes.
|
| 내용 |
v.1.Process Technology -- v.2.Process Integration. -- v.3.The Submicron MOSFE
|
| 주제 |
Integrated Circuits --Very Large Scale Integration.
Silicon.
|
| LCCN |
86-081923 //r91
|
| ISBN |
096167237 (v.1) :c\77935
096167245 (v.2) :c\51935
096167253 (v.3) : |
