| 청구기호 |
TK7874 .W635 1986 |
| 형태사항 |
v. <1-4 > : ill. ; 25 cm.
|
| 언어 |
English |
| 서지주기 |
Includes bibliographies and indexes.
|
| 내용 |
v. 1. Process technology -- v. 2. Process integration -- v. 3. Submicron mosfet -- v. 4. Deep-submicron process technology
|
| 주제 |
Integrated circuits --Very large scale integration.
Silicon.
|
| ISBN |
0961672137 (cover : v. 1)
0096167237 (v. 1)
0961672145 (v. 2)
0961672153 (v. 3)
096167217x (v.4)
|
