Silicon processing for the VLSI era

• 서명 / 저자: Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
• 저자명: Tauber, Richard N.;Wolf, Stanley
• 발행사항: Sunset Beach, Calif. : Lattice Press, 1986-1995

• 형태사항: 3 v. : ill. ; 25 cm.
• 언어: English
• 서지주기: Includes bibliographical references and index.
• 내용: v. 1, Process technology. - v. 2, Process integration. - v. 3, The submicron MOSFET.
• 주제: Semiconductors --Etching. ; Integrated circuits --Very large scale integration. ; Silicon.
• LCCN: 86081923
• ISBN: 0961672137 (v. 1) 0961672145 (v. 2) 0906167253 (v. 3)
• 기증: 생명화학공학과 교수 양승만 (6514381, 6538749, 6538752, 6538753)