서지주요정보
Microelectronics processing chemical engineering aspects / [electronic resource]
서명 / 저자 Microelectronics processing [electronic resource] : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.
저자명 Hess, Dennis W.;Jensen, Klavs F
발행사항 Washington, DC : American Chemical Society, ?989.
총서명 Advances in chemistry series ; 221
Online Access http://dx.doi.org/10.1021/ba-1989-0221URL

서지기타정보

서지기타정보
청구기호 QD1 .A355 no. 221
형태사항 1 online resource (xiv, 547 pages) : illustrations.
언어 English
일반주기 Title from PDF title page (ACS publications, viewed Oct 7, 2009).
서지주기 Includes bibliographical references.
주제 Microelectronics --Materials.
Integrated circuits --Design and construction.
Surface chemistry.
Integrated circuits --Design and construction. --fast --(OCoLC)fst00975545
Microelectronics --Materials. --fast --(OCoLC)fst01019771
Surface chemistry. --fast --(OCoLC)fst01139210
TECHNOLOGY & ENGINEERING / Mechanical --bisacsh
ISBN 9780841224032q(ebook) 084122403X
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