서명 / 저자 |
Microelectronics processing [electronic resource] : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.
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저자명 |
Hess, Dennis W.;Jensen, Klavs F |
발행사항 |
Washington, DC : American Chemical Society, ?989.
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총서명 |
Advances in chemistry series ; 221
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Online Access |
http://dx.doi.org/10.1021/ba-1989-0221URL
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