서지주요정보
유체-입자 하이브리드 모형화에 의한 ECR 마이크로파 방전의 수치적 연구 = Numerical studies on ECR-microwave discharge by fluid-particle hybrid modeling
서명 / 저자 유체-입자 하이브리드 모형화에 의한 ECR 마이크로파 방전의 수치적 연구 = Numerical studies on ECR-microwave discharge by fluid-particle hybrid modeling / 최낙헌.
저자명 최낙헌 ; Choi, Nak-Heon
발행사항 [대전 : 한국과학기술원, 1995].
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소장정보

등록번호

8005235

소장위치/청구기호

학술문화관(문화관) 보존서고

DPH 95006

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초록정보

Recently, electron cyclotron resonance (ECR) plasmas has been investigated in order to be used for plasma processing technology. Here, the physical phenomena of the ECR-microwave discharge are numerically studied by a one-dimensional hybrid model of the fluid electrons and particle ions. The present model includes both the ECR heating phenomena and the transport of ions along divergent axial magnetic field lines. Microwave is considered as an energy flow attenuated by the thermal electron fluid. Individual ion motion is determined by ambipolar electric field and Monte-Carlo collisions together with the $\nabla$B force. In the fluid description of electrons, electron motions are coupled to the ions through ambipolarity and the energy transport is treated with the temperature equation. The argon gas discharges are simulated and the pressure dependences are analyzed for microwave power deposition, electron temperature, plasma density, plasma potential and ion energy distribution. The results of simulation are compared well with the previous experimental results. Especially the results show the two characteristic features of the measurements for the ion energy distribution: the low energy peak as found in the energy analyzer measurements and the high energy bump as found in LIF measurements. And the strong effect of the distributed ionization on the ion energy distribution is observed.

서지기타정보

서지기타정보
청구기호 {DPH 95006
형태사항 viii, 85, v p. : 삽도 ; 26 cm
언어 한국어
일반주기 부록 : 원통대칭인 코일전류에 의한 자기장의 계산
저자명의 영문표기 : Nak-Heon Choi
지도교수의 한글표기 : 최덕인
지도교수의 영문표기 : Duk-In Choi
학위논문 학위논문(박사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 78-84
주제 사이클로트론 공명. --과학기술용어시소러스
방전. --과학기술용어시소러스
플라스마 시뮬레이션. --과학기술용어시소러스
Cyclotron resonance.
Hybrid computer simulation.
Electric discharges.
Plasma (Ionized gases)
하이브리드 시스템. --과학기술용어시소러스
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