서지주요정보
배치형 반복학습제어방법을 이용한 Slit coater의 제어기 설계 = Controller design for a slit coater using batch type iterative learning control
서명 / 저자 배치형 반복학습제어방법을 이용한 Slit coater의 제어기 설계 = Controller design for a slit coater using batch type iterative learning control / 김성민.
저자명 김성민 ; Kim, Sung-Min
발행사항 [대전 : 한국과학기술원, 2004].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014911

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 04013

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

In producing TFT-LCD, as the glass size gets larger, conventional Spin Coaters can not meet its coating specification. The Slit Coater which coats the glass with PR(Photo Resist) by extrusion needs to be developed. The Slit Coater coats the glass with PR extruded through the slot die which is moved along the horizontal direction by the linear motor while floated by the air bearing to reduce the external disturbance effects. The purpose of this system is to coat the glass with the uniform thickness of 1.5㎛ with the maximum ±3% variation after volatilization of 88% of PR. The systematic error in thickness variation caused by the problems such as mechanical inaccuracy, efficiency of pump, stage flatness, linear motor velocity ripple, and setup skill, is reduced by controlling the velocity profile in y direction. Feedback control approach can not be applied because there is no on-line thickness measurement device. ILC(Iterative Learning Control), which is one of open loop control approaches, is applied to find the proper velocity profile. Because we can only measure the thickness after volatilization of PR, the conventional ILC approach requires too much time and too many iterations. Batch type ILC algorithm is developed to reduce the time and the number of iterations. To find the initial velocity profile based on the system model, we identified the system through experiments. The proposed method is applied to the Slit Coater and its feasibility is examined through experiments.

서지기타정보

서지기타정보
청구기호 {MME 04013
형태사항 iii, 75 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Sung-Min Kim
지도교수의 한글표기 : 박영진
지도교수의 영문표기 : Young-Jin Park
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 74-75
주제 반복학습제어
코터
ILC
Coater
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