서지주요정보
기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용 = Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer
서명 / 저자 기구학적 커플링을 이용한 3축 정밀 스테이지의 설계, 특성분석 및 타원편광분석기 입사각 정렬에의 응용 = Design, analysis of 3-axis precision stage using kinematic coupling and an application to incident angle alignment of ellipsometer / 정재화.
저자명 정재화 ; Jeong, Jae-Hwa
발행사항 [대전 : 한국과학기술원, 2000].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8010898

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 00073

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

The demand for high precision stage is increasing in the fields of nanotechnology. This paper handles a novel design of 3-axis (z-axis, pitch, roll) motion stage and an application to incident angle alignment of ellipsometer. Ellipsometer is known as the best inspection instrument for measuring optical indices and thickness of thin films. It is notable that the ellipsometry parameters psi and delta, not the physical quantity of interest, are measured by an ellipsometer. Ellipsometery parameters are functions of the incidence angle and depend strongly on the incidence angle factor. So it is clear that the accuracy of the incident angle is important in ellipsometer. To develop several properties of stage for ellipsometer, the kinematic coupling is used in this paper. Generally the kinematic coupling has many advantages, such as closed form motion solution, high repeatability on the sub-micron level, low construction cost, and no play between mating parts. The forward and inverse kinematic equations of the stage are derived in this paper. The kinematic equations represent the relation between the positions of actuators and tilting angles. And the kinematic error analysis is performed in order to minimize angle errors of the stage. As a result of that, the alignment error of actuator is a dominant error source. Also this result is used in the design and manufacturing process of the stage. The incident angle auto-alignment algorithm of ellipsometer consists of two steps, searching the spot and alignment to the center of detector. The first step, searching the spot, makes that the spot is in the detectable area of detector. The second step, alignment to the center of detector, is aligning the spot to the center of detector. It is possible the incident angle auto-alignment without additional alignment sensor by this algorithm. The experimental result shows that it takes about 30 seconds to align incident angle automatically.

서지기타정보

서지기타정보
청구기호 {MME 00073
형태사항 vi, 57 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jae-Hwa Jeong
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 30-31
주제 기구학적 커플링
3축 스테이지
타원편광분석기
입사각 정렬
Kinematic coupling
3-Axis stage
Ellipsometer
Incident angle alignment
QR CODE qr code