CSM(confocal scanning microscopy) has been used in biomedical application, materials science, semiconductor quality control and forensic application. A confocal scanning microscopy consists of a light projection device with which a small spot of a light beam is shaped on a specimen, a light detector device with a pinhole or single mode fibre, and a mechanism for two-dimensional beam scanning. A image profile can be regenerated in confocal scanning microscopy with many advantages of non-contact, high speed, high resolution of thick specimen comparatively. But it is a important matter for high resolution to align pinhole and other optical components . Generally, Optical system has several aberrations which of all cannot be compensated ideally. Further more, the conditions of component give rise to the fatal distortion of a image profile. In a beam scanning type using acousto-optical deflector, the peak intensity of detecting signal in the confocal point spread function diminishes when the beam spot has parasitic motion on the detector according to the limits of effective pupil at the deflector.
This paper shows the design techniques of CSM especially using AO deflector when the error sources such as position errors of optical component change, and the mathematical expression of the light in the optical fields of system. It proposes progressive methods of calibration concerned with the setting error of system.
