서지주요정보
이중서보를 이용한 초정밀 X-Y 테이블 평면 3자유도 위치제어 = 3-Axis dual-servo control of an XYTheta-stage for ultraprecision positioning
서명 / 저자 이중서보를 이용한 초정밀 X-Y 테이블 평면 3자유도 위치제어 = 3-Axis dual-servo control of an XYTheta-stage for ultraprecision positioning / 이창우.
저자명 이창우 ; Lee, Chang-Woo
발행사항 [대전 : 한국과학기술원, 1997].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8007168

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 97021

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Precision positioning stage with nanometer order accuracy over long travel is demanded especially for a semiconductor lithography, an ultraprecision machine tool and an ultraprecision metrology in recent year. This precision stage performance requirement is consider not easy to be fulfilled simply by improving existing stage design which depends on mechanical accuracy, so implemented in this paper a new design and control of ultraprecision stage based upon the concept of dual servo, the whole mechanism of the stage is composed of two sub-stages; one is a global stage configured with three d.c. linear motors and the order is a micro stage with piezoelectric microactuators for fine motion control. A dual servo is basically constituted in an integrated form two distinct servos with mutually compensating characteristics; the global servo for long travel whereas the micro servo for nanometer order positioning resolution and fast response. The both servos are synchronously controlled with feedback position signals supplied from plain mirror type laser interferometers. Main emphasis of this paper is given to develop an appropriate control model of the dual servo stage with aims to achieve an overall positioning reproducibility of 10 nm in aligning wafers of 200 mm diameter.

서지기타정보

서지기타정보
청구기호 {DME 97021
형태사항 ix, 137 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Chang-Woo Lee
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학과,
서지주기 참고문헌 : p. 126-137
주제 이중서보
마이크로 서보
글로벌 서보
초정밀 스테이지
실시간 보상
Dual servo
Micro servo
Global servo
Ultraprecision stage
Real time correction
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