서지주요정보
$Y_2O_3$ thermal barrier 코팅층 중의 잔류응력 형태와 결정성장에 관한 연구 = A study on the residual stress and crystal growth of $Y_2O_3$ thermal barrier coatings
서명 / 저자 $Y_2O_3$ thermal barrier 코팅층 중의 잔류응력 형태와 결정성장에 관한 연구 = A study on the residual stress and crystal growth of $Y_2O_3$ thermal barrier coatings / 최한메.
저자명 최한메 ; Choi, Han-Mei
발행사항 [대전 : 한국과학기술원, 1995].
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소장정보

등록번호

8005730

소장위치/청구기호

학술문화관(문화관) 보존서고

MCM 95011

휴대폰 전송

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초록정보

$Y_2O_3$ thermal barrier coatings(TBC) were deposited on Inconel substrates by reactive DC magnetron sputtering of yttrium target in oxygen and argon gas mixtures. Residual stress states and film orientations were examined by X-ray diffraction method. The stress states and crystallographic orientations were found to depend on the total working pressures but not the $O_2$/Ar flow ratios. At working pressures below 0.07torr, films were in high compressive stress states and (111) orientations, at pressure ranges between 0.10torr and 0.15torr, films were in moderate compressive stress states and (100) orientations and at pressures over 0.20torr, films were in zero stress states and random orientations. Coatings were also deposited at various substrate temperatures for understanding the cause of these orientations. It is suggested that the strain energy of (111)plane is lower than that of (100)plane, the surface energy of (111)plane is greater than that of (100)plane and there are another planes which have surface energies lower than that of both (111) and (100)planes. With annealing of deposited films, Ar contents of the films were understood by the atomic-peening effect.

서지기타정보

서지기타정보
청구기호 {MCM 95011
형태사항 [ii], 61 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Han-Mei Choi
지도교수의 한글표기 : 최시경
지도교수의 영문표기 : Si-Kyung Choi
학위논문 학위논문(석사) - 한국과학기술원 : 무기재료공학과,
서지주기 참고문헌 : p. 59-61
주제 Residual stresses.
Depositions.
Sputtering (Physics)
Matals --Heat treatment.
잔류 응력. --과학기술용어시소러스
결정 성장. --과학기술용어시소러스
스퍼터링. --과학기술용어시소러스
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