Palladium (Pd) impregnated alumina membrane is prepared by sol-gel technique for hydrogen separation. However, since the palladium membrane does not have a satisfactory selectivity for a practical application, we modify the pore structure of the membrane synthesized by sol-gel technique. In this work, the pores of palladium impregnated alumina membrane prepared by sol-gel technique was densified by a metal organic chemical vapor deposition (MOCVD) process. The metal source, palladium(II) acetate, in pores was decomposed in nitrogen atmophere. During MOCVD, temperature is gradually increased from room teperature to 180℃ under reduced pressure. we formed an intermediate layer of palladium in the vicinity of the interface between the two layers of the support. Permeation fluxes through the membrane are measured for $N_2$ and $H_2$. The results show that the deposition of palladium acetate vapor in pores can enhance the separation factor of hydrogen relative to nitrogen upto 4.78 for pressure difference at 5 psi.
