A mirror-like grinding of brittle materials are required in many precision engineering region. Ductile regime grinding, a new grinding technology for brittle materials, is considered as a solution of difficult-to-cut materials grinding. It is known that a fracture mechanism of brittle materials transient to plastic deformation in the region of extremely small depth of grinding or removal rates.
In this paper, ductile regime grinding experiments has been performed using micro-positioning grinding table. That does not require position sensor but uses piezoelectric voltage feedback. And with hysteresis-considering reference input, it has sub-micro meter order of displacement resolution. As a result of experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as small depth of grinding.