서지주요정보
TCP 장비내에서 플라즈마의 가열과정 및 수송현상에 관한 연구 = Study on the heating mechanism and transport phenomena of plasma in a TCP device
서명 / 저자 TCP 장비내에서 플라즈마의 가열과정 및 수송현상에 관한 연구 = Study on the heating mechanism and transport phenomena of plasma in a TCP device / 김성식.
저자명 김성식 ; Kim, Sung-Sik
발행사항 [대전 : 한국과학기술원, 1995].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8005093

소장위치/청구기호

학술문화관(문화관) 보존서고

MPH 95006

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

One-dimensional and two-dimensional transport model of a transformer coupled plasma (TCP) are developed and the argon discharges at various conditions are simulated. In the 1-D modeling, collisionless heating mechanism, which has an important role in sustaining discharge at low gas pressure, is included and the finite length effect of collisionless heating mechanism is considered. The 1-D transport model is combined with the power absorption model including these collisionless effects and then the fluid equations are solved under appropriate plasma-sheath boundary conditions. We obtain various quantities such as the axial profiles of plasma density, electron temperature, fluid velocity, inductive electric field, and power deposition. The result of the calculation of surface impedance at various chamber length shows the strong dependence of surface impedance on the chamber length and the results of simulation compare well with the experimental observation. The 2-D model is developed using simplified transport equation which is obtained from the continuity equation and electron energy balance equation. For the calculation of power absorption, the inductive electric field induced by antenna coil is evaluated by 2-dimensional wave equation using a finite difference method. From these, the power deposition and plasma density profile in 2-dimension are calculated.

서지기타정보

서지기타정보
청구기호 {MPH 95006
형태사항 iii, 60 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Sung-Sik Kim
지도교수의 한글표기 : 장충석
지도교수의 영문표기 : Choong-Seok Chang
학위논문 학위논문(석사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 58-60
주제 Computer simulation.
Plasma heating.
Transport theory.
플라스마 시뮬레이션. --과학기술용어시소러스
플라스마 가열. --과학기술용어시소러스
수송 현상. --과학기술용어시소러스
Plasma (Ionized gases)
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