서지주요정보
열처리에 의한 $Hg_{1-x}Cd_xTe$ 적외선 감지 소자의 접합 특성 향상 = Improvement of the junction characteristics in $Hg_{1-x}Cd_xTe$ IR photodetector by thermal annealing
서명 / 저자 열처리에 의한 $Hg_{1-x}Cd_xTe$ 적외선 감지 소자의 접합 특성 향상 = Improvement of the junction characteristics in $Hg_{1-x}Cd_xTe$ IR photodetector by thermal annealing / 정희찬.
발행사항 [대전 : 한국과학기술원, 1994].
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소장정보

등록번호

8004963

소장위치/청구기호

학술문화관(문화관) 보존서고

MEE 94089

휴대폰 전송

도서상태

이용가능(대출불가)

사유안내

반납예정일

리뷰정보

초록정보

The p-n junction characteristics of the $Hg_{1-x}Cd_xTe$ implanted by boron have been studied. After ion implantation, the carrier concentration near the surface is $10^18cm^{-3}$. After thermal annealing the concentration near the surface is lower to $10^17cm^{-3}$. When the implanted sample is annealed for 20min at 200℃, the depth of the p-n junction is deep and the structure of the junction is changed from $n^{+}/p$ to $n^{+}/n^{-}/p$. From the analysis of the concentration and mobility near the junction the diffusion process about thermal annealing is known. That is, the Hg which are generated by ion implantation are diffused to the HgCdTe. And they eliminate the Hg vacancies near the junction the source of carrier at n- region is not defect but residual donor impurity. The P.V. devices are fabricated. When it is annealed for 20 min at 200℃ the reverse leakage current flows much. But when annealed for 20 min at 150℃, the characteristics of the device are improved. First, because P-contact resistance is decreased the forward characteristic of the device is improved. Second, because the tunneling current is decreased the reverse maximum dynamic resistance is increased. On the conclusion, After thermal annealig the p-n junction characteristics are improved and the characteristics of the device are improved.

서지기타정보

서지기타정보
청구기호 {MEE 94089
형태사항 ii, 54 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Huy-Chan Jeong
지도교수의 한글표기 : 이희철
지도교수의 영문표기 : Hee-Chul Lee
학위논문 학위논문(석사) - 한국과학기술원 : 전기및전자공학과,
서지주기 참고문헌 수록
주제 Thermal analysis.
적외선 탐지기. --과학기술용어시소러스
감지 증폭기. --과학기술용어시소러스
반도체 접합. --과학기술용어시소러스
Semiconductors --Junctions.
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