서지주요정보
솔젤법으로 제조한 $PbTiO_3$ 박막의 열처리 효과 = Effect of heat treatment on the property of Sol-Gel derived $PbTiO_3$ thin film
서명 / 저자 솔젤법으로 제조한 $PbTiO_3$ 박막의 열처리 효과 = Effect of heat treatment on the property of Sol-Gel derived $PbTiO_3$ thin film / 호기철.
저자명 호기철 ; Ho, Ki-Cherl
발행사항 [대전 : 한국과학기술원, 1994].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8004751

소장위치/청구기호

학술문화관(문화관) 보존서고

MCHE 94035

SMS전송

도서상태

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초록정보

Thin films of $PbTiO_3$ were deposited on bare silicon wafers by the sol-gel processing method. The crystallographic and morphological properties of the thin films have been analyzed by the X-ray diffraction method and the scanning electron microscopy. The elemental composition was determined by auger electron spectroscopy. The heat treatment of films were excuted at temperature range from 400℃ to 750℃. The perovskite-type structure was observed only with films annealed at 440℃ and the partially pyrochlore-type structure was found at temperature range from 480℃ to 550℃. The thin films annealed at temperatures more than 600℃ was appeared the only perovskite-type structure. The formation of the lead-silicate glass and the silicon-dioxide was investigated by FTIR. Lead-silicate glass was appeared in thin films annealed at temperatures more than 500℃ and silicon-dioxide at temperatures more than 600℃. The thickness of as-dried films was measured by the ellipsometer and assured by side-view of the thin films by SEM.

서지기타정보

서지기타정보
청구기호 {MCHE 94035
형태사항 ix, 78 p. : 삽도 ; 26 cm
언어 한국어
일반주기 부록 : Date table of figure
저자명의 영문표기 : Ki-Cherl Ho
지도교수의 한글표기 : 김도현
지도교수의 영문표기 : Do-Hyun Kim
학위논문 학위논문(석사) - 한국과학기술원 : 화학공학과,
서지주기 참고문헌 : p. 72-75
주제 Thin films.
Morphology.
박막. --과학기술용어시소러스
표면 성질. --과학기술용어시소러스
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