Since Ion_Assisted Deposition(IAD) can be used for the fabrication of high-$T_c$ superconducting magnet we investigated the influences of IAD on the directionality of a thin film. We used electron cyclotron resonance(ECR) as an ion source and used polycrystalline MgO, polycrystalline YSZ, and Ni(99.9\%) as substrates. $CeO_2,\; SrTiO_3$, YSZ, and so on were deposited by using RF sputtering and metallic thin films such as Ni were deposited by using thermal evaporation. We observed that as thin film grows better with a polycrystalline structure. we verified that ion_beam assist can induce the directionality of a thin film by observing the peak of YBCO(103) of XRD $\Phi\_scan$.
