Amorphous carbon film of diamonalike were tried the experiment to the deposition with DC plasma for methane and hydrogen gas mixture. But graphitelike nearly hardcarbon film were achieved at the condition that the chamber pressure is 1 m bar and mixing rate is 10\%. Historical sursey of the system and technique about hard carbon film were arranged. And we maked an experiment of Langmuir probe, OES(Optical emission spectroscopy) for the knowledge of the relation of methane plasma and deposition. The theoritical study for nucleation having a $SiO_2$ layer or not and growth kinetics were proposed. Also experimental method of that were included.
