Crack-free ferroelectric PLZT(9/65/35) thin films on the ITO-coated Corning 7059 glass substrates were prepared from complex alkoxides solution by sol-gel spin coating method. Additional ethylene glycol restricted crack creation, because it acted as a cross-linker. Experiments were performed by systemmetical way called experimental design. Several important experimental factors were arranged in $L_8(2^7)$ orthogonal array table. The analysis of the variance for the experimental results indicated that the firing temperature and time is the most important factor affecting the crystallization of the perovskite phase. The films mainly consisted of the perovskite phase when fired over 600℃ at air atmosphere for 1 hour after 5 coating cycles on ITO-coated Corning 7059 glass substrate with 5 mol% Pb excess coating solution. Optical, electrical and electrooptical properties of the PLZT thin films were investigated. And it was confirmed that the slim loop ferroelectric PLZT(9/65/35) thin film is a promise material for a flat panel display and an optical shutter.
