Y-Ba-Cu-O superconducting thin film have been preapared on the MgO (100) single crystal by metal organic chemical vapor deposition. In this work, the effects of deposition temperature and the input gas ratio on the microsturcture, the texture coefficient and the sperconducting transition temperature are investigated.
At the deposition temperature of 900℃, microstructure of MOCVD Y-Ba-Cu-O thin film was isotropic and (001) plane was preferred. As the deposition temperature is lowered to 780℃, microstructure became more anisotropic and (h00) planes dominontly appeared on X-ray diffraction profile.
The superconducting transition temperature width was narrow at deposition temperature range of 800℃-780℃. Y-Ba-Cu-O thin film deposited at deposition temperature of 800℃ showed higest transition temperature of 86K.
As the deposition temperature is lowered from 900℃ to 700℃, the ratio of deposited to evaporated mole percent of Cu increased. Transmission electron microgaph showed that a lot of twins exist in grains, which was suggested and observed in previous papers.
From these experimental results, it is suggested that the deposition temperature has great effect on microstructure and electrical property of MOCVD Y-Ba-Cu-O thin film.
