This study concerns with the topographical profile measurement for mirror surfaces based upon an optical technique called the phase measuring interferometry. A practical measuring principle has been established with an aim to realizing in-process measurement with nanometer resolution.
Main emphasis has been given to developing a general computer algorithm which can derive three dimensional surface profiles from interference fringe patterns formed by phase interferometry. As a result, an effective algorithm is suggested in this study and its validity has been proved through a series of computer simulation.
