The vibrations of the outer-clamped rotating disk which simulates a wafer cutting machine are investigated. The effects of the centrifugal force and the outer-fixture extension caused by rotation and radial tension to study the vibration characteristics of the outer clamped rotating disk are considered. And mode shapes of the outer-clamped stationary disk subjected to uniform and partially non-uniform radial tension are studied. The modal parameters of the disk are obtained employing Galerkin's method.
The increase of the spin speed decreases the natural frequencies of disk which is clamped by ideally rigid fixture. But the flexibility of fixture should be taken into account because the fixture extension caused by rotation increases the natural frequencies. The stress distributions of the rotating disk with the extensible outer-fixture are formulated and the stress formulations well represent this phenomenon.
Experiments for a rotating disk and a stationary disk in case of uniform and non-uniform tension are also performed and it is found that the experiment and simulation results are in good agreement.
