서지주요정보
RF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구 = Fabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method
서명 / 저자 RF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구 = Fabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method / 유형준.
저자명 유형준 ; Yoo, Hyung-Joun
발행사항 [대전 : 한국과학기술원, 1990].
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소장정보

등록번호

8000514

소장위치/청구기호

학술문화관(문화관) 보존서고

MAP 9012

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

There are many problems which should be solved before implementation of high $T_c$ superconducting oxide thin films to the microelectronics devices. These problems are: difficulties in film composition control; a long list of process parameters which affect the various properties of deposited films; relatively poor understanding of the relationships between film structure and the properties; and so on. In this respect, this study focuses on the atomic composition of fabricated Y-Ba-Cu-O thin films as a function of target to substrate distance (T/S-distance) and $O_2$ partial pressure of sputter gas mixture, and relationships among compositions, structures, and critical temperatures of the films. The atomic compositions of the films were controlled through narrow gap RF-sputtering method and almostly reached to its ideal ratio, Y:Ba:Cu=1:2:3, when T/S-distance=10mm and sputter gas pressure=50mTorr, for the case of $YBa_{2.5}Cu_{4.5}O_x$ target. Two different substrates of $SrTiO_3$(100) and MgO(100) single crystal was chosen to investigate the effect of substrate on film characteristics. Microstructure of the films was characterized using optical microscope and SEM. Also EPMA was used to analyze atomic composition of the film surface. The superconductivity of the films showed $T_{\infty}=90~95K$, $T_{\infty}=70~75K$ with good reproducibility. The highest critical temperature obtained was 84K for $T_{\infty}$. For resistivity measurement, four probe method with thermally evaporated Au electrodes was adopted. Also the interactions between Y-BaCu-O thin films and $SiO_2$ or $Si_3N_4$ overlay were investigated.

서지기타정보

서지기타정보
청구기호 {MAP 9012
형태사항 [iii], 67 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyung-Joun Yoo
지도교수의 한글표기 : 박신종
공동교수의 한글표기 : 이주천
지도교수의 영문표기 : Sin-Chong Park
공동교수의 영문표기 : Choo-Chon Lee
학위논문 학위논문(석사) - 한국과학기술원 : 물리학과,
서지주기 참고문헌 : p. 66-67
주제 Thin films.
Sputtering (Physics)
초전도체. --과학기술용어시소러스
박막. --과학기술용어시소러스
스퍼터링. --과학기술용어시소러스
Superconductors.
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