Piezoelectric actuators yield hysteresis effects due to its material characteristics. Hysteresis effects of the piezoelectric actuator limit its positioning accuracy when applied for fine motion control. In this study, in order to suppress hysteresis and improve linearity, various dither signal superposition control techmiques and proportional control technique are investigated. As results, it is found that bi-directional pulse signal and proportional control turn out to be effective for suppressing hysteresis effects and improving linearity. After improving linearity, linear model of piezoelectric actuator is decided by experimental method. To prove reasoning of the model, simulation is executed.
