The objective of this study is to design, fabricate piezoelectric accelerometers that can measure the various vibrations occurring in nature, and survey the calibration methods to characterize the performance of piezoelectric accelerometers. The main direction is to determine the dimensions of piezoelectric element and seismic mass with two variables of charge sensitivity and mounted resonance frequency. But since these two variables are mutually in contrast, we must design the accelerometer in combination with these two variables. The calibration methods used in this study are the comparison calibration and gravimeteric calibration method. From comparing the test results of these calibration methods with design values, the feasibility of design is confirmed, and the performance of piezoelectric accelerometers is not only dependent on seismic mass but also the thickness of piezoelectric element.
