Optical planar waveguides are fabricated in X-cut LiNbO3 single crystal substrate by proton exchange (PE) and Ti-indiffused proton exchange(TIPE) method. Parameters of the waveguides are measured by bright M-line spectroscopy. The resulting index profile is calculated by WKB method. PE process is much fast and results in higher index change than Ti indiffusion, and the index change can be controlled by annealing and proton source.
