A $KrF^*$ excimer laser was made as a pumping source of dye laser. To obtain uniform discharge in the high pressure gas mixture, time delay pulse generator and surface spark gap array preionizer were applied. The detailed circuit parameters were analyzed to understand the discharge characteristics.
In this laser system, isolation of preionization circuit from main discharge circuit gives more intensive preionizing effect due to increased preionization capacitance.
Prior to $KrF^*$ excimer discharge, TEA $CO_2$ laser discharge experiment was performed to analyze the electric circuit characteristics. Optimal time delay between preionization and main discharge was 2-3 ㎲. Maximum output energy as 700 mJ at gas mixture $CO_2:N_2:He$ = 1:1:8 and this gives the output energy density of 10 J/1.
At 25KV charging voltage and 2.2 atm KrF gas mixture, output of $KrF^*$ excimer laser was observed by focusing the laser beam with a cylindrical positive lens on carbon paper.