서지주요정보
$CuCl_2$촉매하에서 규소와 염화수소의 반응에 의한 trichlorosilane 의 생성 = The preparation of trichlorosilane from the cupric chloride-catalyzed reaction of silicon and hydrogen chloride
서명 / 저자 $CuCl_2$촉매하에서 규소와 염화수소의 반응에 의한 trichlorosilane 의 생성 = The preparation of trichlorosilane from the cupric chloride-catalyzed reaction of silicon and hydrogen chloride / 이임열.
저자명 이임열 ; Lee, Rhim-Youl
발행사항 [서울 : 한국과학기술원, 1976].
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소장정보

등록번호

4000186

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 7617

SMS전송

도서상태

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반납예정일

초록정보

The preparation of trichlorosilane ($SiHCl_3$, TCS)from the cupric chloride-catalyzed reaction of silicon and hydrogen chloride was studied. With the objective of finding the optimum conditions for obtaining the high yield of TCS, the effects of several variables in the reaction were studied. They were; (1) effect of catalysts, namely $CaCl_2$, $ZnCl_2$ and $CuCl_2$ (2) effect of concentration of $CuCl_2$ (3) effects of reaction temperature between 200℃ and 650℃, and (4) effect of flow rate of hydrogen chloride. The final product was confirmed by NMR mainly to be TCS, and its purity determined by gas chromatography was mainly contaminated by other higher silicon halides. It was found that the product yield of TCS was decreased in the presence of $CaCl_2$ and $ZnCl_2$, whereas $CuCl_2$ proves to be an excellent catalyst. For example at 310℃, the product of TCS was increased by factor of 5.6 as compared to reaction with no catalyst. The product of TCS was increased when the concentration of $CuCl_2$ increase. Using $CuCl_2$ catalyst at 10% (weight) concentration, the optimum temperature for the reaction was found to be between 385℃ and 420℃. In this temperature range, 90% (weight percent) of the total product was TCS. A small amount of $SiH_2Cl_2$ was found in the product. At higher reaction temperature, tetrachlorosilane($SiCl_4$, TET) content of the product was high and at 650℃, 90% of the total product was TET, and only 9% was TCS. The increase of TET content was especially rapid in the temperature range of 520-550℃. The product of TCS was increased as the flow rate of HCI was increased with the catalyst of $CuCl_2$ at 10% and the temperature 400℃, the TCS yield is 82-83% at the flow rate of 200300cc/min and 90% at 400-600cc/min. Therefore, the yield of TCS was determined to be highest when $CuCl_2$ was used at 10% concentration with the HCl flow rate of 400-600cc/min at a temperature range of 385-420℃.

서지기타정보

서지기타정보
청구기호 {MMS 7617
형태사항 iii, 53 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Rhim-Youl Lee
지도교수의 한글표기 : 주웅길
지도교수의 영문표기 : Woong-Kil Choo
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 49-53
주제 Catalysts.
Hydrogen.
Gas chromatography.
Nuclear magnetic resonance.
촉매. --과학기술용어시소러스
염화수소. --과학기술용어시소러스
규소 동위원소. --과학기술용어시소러스
반응 메카니즘. --과학기술용어시소러스
Reaction mechanism.
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