The structure and the operation of a Charge-Coupled Device (CCD) have been studied and a p-channel, 16 bit Conductively-Connected CCD has been designed and fabricated.
The device has surface channel structure, where the holes which are the minority carriers representing the signal voltage are stored at the Si surface and transferred along it.
The operation of the device is in 1$\frac{1}{2}$ phase mode, hence a clock pulse is applied to the phase 1 electrodes and phase 2 electrodes are held fixed by a dc voltage.
The device consists of a source diffusion which forms an input structure together with two input gates, and 32 transfer gates followed by an output gate and a drain diffusion.
The CCD channel was confined by the thin oxide and no channel stop diffusion has been made.
Niche mode has been adopted as an input scheme because of its linear and low noise characteristics, and the independency of the threshold voltages of the input gates. The first input gate is dc biased and input signal voltage is directly applied to the second input gate with sampling pulse applied to the source diffusion.
The asymmetry in potential profile necessary for the charge flow is obtained by ion implantation.
Non-destructive output is obtained by sensing the surface potential under phase 2 electrodes with sensing diffusions. The gate of the output MOS transistor senses the potential variation of the sensing diffusion and output results at the source of the output MOS transistor.
The device has 8 bit tapped outputs, thus it can be used to convert the serial input to parallel output or as a variable delay line.
The results obtained from the test patterns and the characteristics of CCD have been analyzed and discussed.
電荷結合 ( Charge-coupling )의 槪念과 CCD의 構造 및 動作原理를 考察하고 國內에서 가능한 工程에 따라 p-channel 16bit Conductively Connected CCD를 設計, 製作하였다.
測定 結果 얻은 諸特性은 工程上의 諸條件을 고려할때 設計値와 거의 비슷한 값을 보였다.
電荷移動效率 ( Charge Transfer Efficiency )은 滿足할만한 정도가 되지 못하였으나 이는 現在의 技術로 충분히 改善될 수 있을 것으로 생각된다.
따라서 本 論文에서 實驗的으로 製作된 CCD의 特性을 改善할 경우 delay line으로, 또는 通信工學에서 必要로 하는 여러가지 transversal filter등에 應用이 可能할 것으로 생각된다.
