MOCVD 방법으로 제작된 $Y_1Ba_2Cu_3O_{7-x}$ 박막의 in-situ XPS 분석 = In-situ XPS study on the superconducting thin film of $Y_1Ba_2Cu_3O_{7-x}$ deposited by MOCVD

• 서명 / 저자: MOCVD 방법으로 제작된 $Y_1Ba_2Cu_3O_{7-x}$ 박막의 in-situ XPS 분석 = In-situ XPS study on the superconducting thin film of $Y_1Ba_2Cu_3O_{7-x}$ deposited by MOCVD / 선정민.
• 발행사항: [대전 : 한국과학기술원, 1992].

MOCVD is a reliable method to deposite a epitaxial thin film on a large sized or arbitrary shaped substrate. But OM precursors contain organic ligand,, that is to say, many carbons. It is a very important problem how carbons of organic ligand react with oxidation source in gas phase and growing surface of thin film. In this experiment a superconducting thin film of $Y_{1}Ba_{2}Cu_{3}O_{7-x}$ is deposited by MOCVD on MgO polycrystal at Ts=780℃. The thin film is in-situ analysed by XPS.

• 형태사항: [ii], 44 p. : 삽화 ; 26 cm
• 언어: 한국어
• 일반주기: 저자명의 영문표기 : Jeong-Min Seon ; 지도교수의 한글표기 : 염도준 ; 지도교수의 영문표기 : Do-Jun Youm
• 학위논문: 학위논문(석사) - 한국과학기술원 : 물리학과,
• 서지주기: 참고문헌 수록
• 주제: Thin-films. ; Vapor-plating. ; 초전도체. --과학기술용어시소러스 ; 박막. --과학기술용어시소러스 ; 화학 증착. --과학기술용어시소러스 ; Superconductors.