서지주요정보
6자유도 능동 제진 시스템을 위한 제어기 설계에 관한 연구 = A study on design of controller for six degree of freedom active vibration isolation system
서명 / 저자 6자유도 능동 제진 시스템을 위한 제어기 설계에 관한 연구 = A study on design of controller for six degree of freedom active vibration isolation system / 김현창.
저자명 김현창 ; Kim, Hyun-Chang
발행사항 [대전 : 한국과학기술원, 2009].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8019854

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 09072

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Nano precision instruments with nanometer resolution are susceptible to disturbance transmitted mostly from ground vibration and mechanical vibration due to movements of the measuring instrument itself. These kinds of vibrations which are submicrometer level and low frequency distract both precision and accuracy of measuring instruments. So, precision instruments require six degree of freedom active vibration isolation system. In six degree of freedom active vibration isolation system passive isolator and control algorithm are very important factors of performance improvement. The system of this sort has coupling and system uncertainties due to change payload mass. Six degree of freedom active vibration isolation system used in this system has four passive mount and six VCM actuators to transmit force to six axes and six accelerometers to measure six axes acceleration of payload. In this paper, passive isolation system is designed to support payload and attenuate high frequency. For system control, PI controller which is easy to design and $H_\infinity$ controller which is robust to uncertainties and disturbances are designed and proposed to control active isolator and applied to six degree of freedom active vibration isolation system. And then, performance of PI controller is compared with $H_\infinity$ controller. In conclusion, $H_\infinity$ controller is more compatible with six degree of freedom active vibration isolation system which has coupled axis and system uncertainty.

서지기타정보

서지기타정보
청구기호 {MME 09072
형태사항 v, 50 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Hyun-Chang Kim
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 수록
주제 active;vibration;isolation;control;6 degree of freedom
능동;진동;제진;제어;6자유도
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