서지주요정보
재방문 물류흐름을 갖는 양 팔 클러스터 장비의 운용전략 = Operating strategies for dual-armed cluster tools with reentrant job flows
서명 / 저자 재방문 물류흐름을 갖는 양 팔 클러스터 장비의 운용전략 = Operating strategies for dual-armed cluster tools with reentrant job flows / 김수곤.
저자명 김수곤 ; Kim, Su-Gon
발행사항 [대전 : 한국과학기술원, 2004].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8015015

소장위치/청구기호

학술문화관(문화관) 보존서고

MIE 04004

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Cluster tools for semiconductor fabrication, each of which consists of several single-wafer processing modules and a wafer-handling robot, are increasingly used for diverse fabrication processes. They are also being adopted for recent atomic layer deposition processes, where a wafer visits a process module more than once. We examine a scheduling problem for dual-armed cluster tools with such reentrant wafer flow patterns. Conventional swap operation strategy for dual-armed cluster tools cannot be used for the case of such reentrant flow patterns due to inevitable deadlocks. Therefore, we propose two modified strategies, a hybrid operation strategy and a modified swap strategy. The hybrid operation strategy uses simple push-and-wait operation for reentrant process modules and swap operations for all other process modules. The modified swap strategy allows swapping between two different classes of wafers at a reentrant process module, the first-visit and the second-visit wafers, while conventional swap operation exchanges two identical types of wafers. We derive the cycle times of the two strategies in closed forms. It is shown that both strategies have much shorter cycle times than the simple and greedy, push-and-wait strategy. It is also identified when one of the two proposed strategies is better than the other.

서지기타정보

서지기타정보
청구기호 {MIE 04004
형태사항 vi, 56 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Su-Gon Kim
지도교수의 한글표기 : 이태억
지도교수의 영문표기 : Tae-Eog Lee
학위논문 학위논문(석사) - 한국과학기술원 : 산업공학과,
서지주기 참고문헌 : p. 55-56
주제 재방문
클러스터 장비
양 팔
REENTRANCE
CLUSTER TOOL
DUAL-ARM
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