서지주요정보
비구면 거울 측정을 위한 구역별 주사 방법 = Zonal scanning optical figure metrology for aspheric surfaces
서명 / 저자 비구면 거울 측정을 위한 구역별 주사 방법 = Zonal scanning optical figure metrology for aspheric surfaces / 박상련.
발행사항 [대전 : 한국과학기술원, 2004].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014926

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 04028

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초록정보

Aspheric surfaces are generally tested using profilometry or interferometry. But profilometry causes damage to the surface and takes long time to measure large scale. These problems are solved by interferometry which has also high resolution. Therefore interferometry is the best choice to test the large surface. However, the interferometry has one problem. If the spatial frequency of the interferogram is higher than the detector resolution, the result is not reliable. In this case, null lens and computer generated hologram (CGH) are needed. These test methods have some drawbacks. The use of these compensating elements are very expensive and it takes long time to make them. Whenever the aspheric surface changes, it also needs new null optics. To solve this problem, we present zonal scanning method that avoids the use of compensating elements. This method is based on a Fizeau interferometer and a nanopositioning motorized stage. Zonal scanning method consists of varying the distance of an aspheric surface from the focus of an interferometer reference sphere with a nanopositioning motorized stage. As the aspheric surface mounted on the stage is moved along the optical axis, the radius of curvature of the reference wavefront which matches the aspheric surface changes. When one of reference wavefronts having a different radius of curvature most fits the aspheric surface, we can measure that position. This procedure is iterated starting from the optical axis up to the end of the aspheric surface to obtain the surface error being tested. And then each result connects with a suitable algorithm. To obtain accurate results, we present an optimized sliding distance of each step and total sliding distance. We compared the experimental results of zonal scanning method with the null lens test.

서지기타정보

서지기타정보
청구기호 {MME 04028
형태사항 v, 41 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Sang-Ryeon Park
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 40-41
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