서지주요정보
Stewart platform을 이용한 정밀 구동 스테이지의 설계 및 특성분석 = The design and test of fine stage using stewart platform
서명 / 저자 Stewart platform을 이용한 정밀 구동 스테이지의 설계 및 특성분석 = The design and test of fine stage using stewart platform / 강성훈.
저자명 강성훈 ; Kang, Sugn-Hoon
발행사항 [대전 : 한국과학기술원, 2004].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014978

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 04080

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

With the progress of the biological sciences, the importance of observation of biological specimen, such as DNA or protein, has increased. It is one of the essential parts for this observation to get the microscopic images with nm resolution. For this purpose, the soft X-ray microscope is being researched and made. Soft X-ray microscope is generally composed of X-ray source, specimen, detector, and two optical components; condenser and objective. The main and most important role of the condenser is to be aligned to the position at which it can illuminate the specimen precisely and to be fixed at that position with low sensitivity to the disturbances from environment. The condenser especially needs to be aligned with 5-dof from which a rotation about the optic axis is excluded to get a satisfactory microscopic image. So the precision stage with more than 5-dof, nm resolution, and high stiffness is needed to align these components. The parallel mechanism is suitable for the high stiffness. But it is a rather hard work to make a parallel mechanism with 5-dof from which one rotation is excluded, and the precision stage with 6-dof is studies for several decades much more than that with 5-dof. In this paper, therefore, the precision stage with 6-dof, nm resolution, and high stiffness is proposed. A typical example of the precision stage with 6-dof is Stewart Platform, which is first proposed by D. Stewart in 1965. The fixed base plate and the moving platform in Stewart Platform are generally connected with 6 struts, ball joints and/or universal joints. But these kinds of joint have always clearance and backlash that make impossible to achieve nm resolution of the stage. In this paper, a new kind of flexible joint and Stewart platform using this joint is proposed. The modeling and optimal design of Stewart platform using flexible joint, and the experimental results are also presented.

서지기타정보

서지기타정보
청구기호 {MME 04080
형태사항 vi, 57 p. : 삽도 ; 26 cm
언어 한국어
일반주기 부록 : A, 유연기구 메커니즘의 운동방정식 유도
저자명의 영문표기 : Sugn-Hoon Kang
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 32-34
주제 Stewart Platform
정밀 구동 스테이지
Stewart Platform
Fine Stage
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