서지주요정보
위상천이 회절격자 간섭계 = Phase shifting diffraction grating interferometer
서명 / 저자 위상천이 회절격자 간섭계 = Phase shifting diffraction grating interferometer / 황태준.
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014687

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 03066

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

This thesis is focused on the design of phase shifting diffraction grating interferometers for precision optical surface testing. The interferometer employs a single reflective diffraction grating, which performs manifold functions of beam splitting, beam recombination, and phase shifting driven by a piezoelectric micro-actuator. The suggested design allows generating a high quality reference wave from a small active grating area that can be readily fabricated with good homogeneity of grating substrate and uniformity of groove spacing. The test and reference waves encounter no other optical components, so only a small active surface area of the grating affects the test result. And the fiber-optic confocal microscopic design adopted to solve the alignment problem between the grating and the converging wave greatly reduces systematic errors of the interferometer. In addition, the capability of phase shifting provided by translating the grating enables to readily measure figure errors to nanometer accuracy. It is demonstrated that the grating interferometer can readily be extended to test large aspheric surfaces by incorporating appropriate computer generated holograms (CGH) modifying the optical path of the test wave front. Binary amplitude modulation type CGHs are designed and fabricated by an e-beam lithography system for null testing of large aspheric surfaces. Experimental results of spherical and aspheric surface testing verify the measurement system.

서지기타정보

서지기타정보
청구기호 {DME 03066
형태사항 x, 220 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Tae-Joon Hwang
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 113-116
주제 간섭계
회절격자
interferometer
diffraction grating
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