서지주요정보
3차원 브리지형 탄성힌지 메커니즘을 이용한 압전 구동기의 개발 = Development of piezoactuator using three-dimensional bridge-type hinge mechanism
서명 / 저자 3차원 브리지형 탄성힌지 메커니즘을 이용한 압전 구동기의 개발 = Development of piezoactuator using three-dimensional bridge-type hinge mechanism / 김준형.
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014676

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 03055

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

In many applications, a flexure hinge mechanism has often been used to amplify the displacement of a commercial multilayer piezoelectric actuator, in other words, piezostack because piezostacks have a limited deformation range of about 10 μms per centimeter. In this thesis, a new piezoelectric actuator using a bridge-type flexure hinge mechanism is developed and optimized. The mechanism consists of two bridge mechanisms, which are connected vertically in three-dimensional space and it has a symmetric structure which reduces negative effects due to temperature change. Because the developed hinge mechanism has three-dimensional structure, it has a high amplification ratio in a relatively small size. Generally, a simple lever rule can be used to estimate the amplification ratio of a hinge mechanism. The lever rule is very straightforward, but shows large errors in real systems, a factor of 10 in this example. Although FEM(Finite Element Method) software gives almost the same results as a real system, it requires an elaborate and time-consuming analysis procedure. In this study, the developed mechanisms are modeled by matrix methods assuming flexure hinges as 6 degree-of-freedom spring elements to show the validity of the proposed hinge mechanism. To verify the derived matrix model, displacement and frequency experiments are performed. The experimental result shows that the displacement error between the matrix model and experiments is below 10 percent when all other parts except hinges are sufficiently thick. This indicates that the deformation of the hinge in the parasitic direction should be considered for more exact estimation of the output displacement of the bridge-type hinge mechanism. To understand the general trend of the developed mechanism, the maximum efficiency, blocked force, and fundamental frequency are optimized with respect to the change of the output displacement using the developed matrix model. Experiments result show that the output displacement at 100 Volts is about 350 μms in size of 45×45×30㎣ and about 150㎛ in size of 30×30×15㎣. The developed hinge mechanism are to be used as a nano-gripper actuator which should be operated in small chamber such as SEM(Scanning Electron Microscope) chamber, so miniaturization of hinge mechanism is very important. To reduce the size of the developed hinge mechanism, geometrical nonlinear analysis and link deformation analysis are performed. When the total size of the bridge-type hinge mechanism is small compared to the deformation range of the hinge mechanism, the geometrical nonlinearity makes a considerable error in the output displacement. In this research, the incremental method based on the matrix model is developed to analyze the effect of the geometrical nonlinearity. The analysis and experiment results show that the geometrical nonlinearity error is about 10 percent of the moving range, so it should be considered in high-precision application. To analyze the link deformation problem, which is impossible using matrix model and essential for miniaturization of the mechanism, matrix displacement method is used. Analysis results shows that when the link thickness is smaller than 10 mm, the matrix model shows significant error and matrix displacement method is needed.

서지기타정보

서지기타정보
청구기호 {DME 03055
형태사항 vii, 82 p. : 삽화 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jun-Hyung Kim
지도교수의 한글표기 : 곽윤근
지도교수의 영문표기 : Yoon-Keun Kwak
수록잡지명 : "Development of a piezoelectric actuator using a three-dimensional bridge-type hinge mechanism". Review of scientific instruments, v.74 no.5, pp.2918-2924 (2003)
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 80-82
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