서지주요정보
멀티레터레이션에 근거한 점회절을 이용한 대영역 표면형상 측정 = Large scale surface profile measurement using point diffraction based on multilateration
서명 / 저자 멀티레터레이션에 근거한 점회절을 이용한 대영역 표면형상 측정 = Large scale surface profile measurement using point diffraction based on multilateration / 김병창.
저자명 김병창 ; Kim, Byoung-Chang
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8014304

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 03027

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Surface profile metrology is preferably performed with two-arm interferometers such as Twyman-Green or Fizeau types that compare the test wave front reflected from the object surface under inspection with a reference wave front generated from an ideal model surface. In conducting the optical comparison testing, the deviation of the test wave front from the reference wave front should be bounded so that the spatial frequency of generated interferometric fringes falls within the Nyquist frequency limit of the photo-detector array used. Otherwise, the problem of $2\pie$ ambiguities arises in phase unwrapping with subsequent failure of accurate quantitative evaluation. This is in fact often the case when inspecting rough surfaces whose profile irregularities are of the order of magnitude of the wavelength of light. In this study, as a new approach for profiling rough surfaces, we present a diffraction interferometer system that has been specially devised for absolute profile metrology. The absolute interferometer system is constituted with multiple sources of two-point diffraction and a CCD camera of two-dimensional photo-detectors array. The diffraction sources are deployed along the circumference of a circle, while the camera is located about at the center of the circle facing the object surface during measurement. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers. Two optical fibers are housed in a ceramic ferrule to emanate two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2 × 1 optical fiber coupler, while one of the fibers is elongated using a piezoelectric PZT tube to produce phase shifting. The camera captures fringe patterns while switching on and off all the diffraction sources one by one in sequence to obtain multiple fringes images projected from different geometrical angles. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. when a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 micrometers with a standard deviation of 1.5 μm. In conclusion, the two-point-diffraction interferometer system described so far is capable of profiling rough surfaces with high precision without enlarging the wavelength of light. Perhaps, the diffraction interferometer system may be compared to geometric optical profilometry techniques such as optical triangulation with projection of structured light or moire topography relying on geometrical intensity interference. However, the measurement principles of the diffraction interferometer system are based on wave optics, whose accuracy is therefore far better, to a level of a few micrometers, than the geometric optical techniques.

서지기타정보

서지기타정보
청구기호 {DME 03027
형태사항 viii, 111 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Byoung-Chang Kim
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
수록잡지명 : "Absolute interferometer for 3-D profile measurement of rough surfaces". Optics letters, (2003)
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 107-111
주제 형상측정
광섬유
점회절
멀티레터레이션
간섭계
Surface profile measurement
optical fiber
point diffraction
multilateration
interferometer
QR CODE qr code