서지주요정보
다중 슬롯 클러스터 장비의 안정상태 스케줄링 분석 = Steady state scheduling analysis of multi-slot cluster tools
서명 / 저자 다중 슬롯 클러스터 장비의 안정상태 스케줄링 분석 = Steady state scheduling analysis of multi-slot cluster tools / 김용문.
저자명 김용문 ; Kim, Yong-Moon
발행사항 [대전 : 한국과학기술원, 2003].
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등록번호

8013947

소장위치/청구기호

학술문화관(문화관) 보존서고

MIE 03005

SMS전송

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초록정보

A cluster tool for semiconductor manufacturing integrates several single wafer processing modules with a material handling system such as a robot. However, a new multi-slot tool architecture that processes several wafers simultaneouly at each processing module is recently proposed in order to maximize the throughput per the footprint. We examine steady state scheduling methods of a dual-armed multi-slot cluster tool. Two conventional scheduling methods, the swap strategy and the single-arm strategy, are examined for their performances for dual-armed multi-slot tools. The swap strategy exchanges the wafer at an arm with the processed wafer at a module. It is known to be superior than any other scheduling method for dual-armed cluster tools. The single-armed strategy uses only a single arm as in a single-armed cluster tool. We show that in a dual-armed multi-slot tool, the single-arm strategy leads to the higher throughput rate than the swap strategy under some condition. We propose a new hybrid scheduling strategy that combines the merits of the two scheduling methods and analyze the performance.

서지기타정보

서지기타정보
청구기호 {MIE 03005
형태사항 iii, 51 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Yong-Moon Kim
지도교수의 한글표기 : 이태억
지도교수의 영문표기 : Tae-Eog Lee
학위논문 학위논문(석사) - 한국과학기술원 : 산업공학과,
서지주기 참고문헌 : p. 50-51
주제 클러스터 장비
스케줄링
양팔 로봇
다중 슬롯
안정상태
cluster tool
scheduling
dual gripper
dual blade
multi-slot
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