서지주요정보
가상의 백색광 주사 간섭계의 개발 = Virtual white-light scanning interferometer
서명 / 저자 가상의 백색광 주사 간섭계의 개발 = Virtual white-light scanning interferometer / 김영식.
저자명 김영식 ; Ghim, Young-Sik
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8013867

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 03025

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

There are many precise surface measurement methods. Of these methods, white-light interferometer is the powerful tool capable of profiling surfaces with resolution on the order of nanometer. This technique allows us to extract three-dimensional surface profile without 2π-ambiguity. However, there are many problems to be tackled to enable white-light interferometer to be a more-general tool for precision surface metrology. One of these problems, the phase change upon reflection from the target surface is the most serious problems. It induces measurement errors of several tens of nanometer.Nowadays many researches on white-light interferometer are continued to solve these problems. This paper proposes Virtual White-light Scanning Interferometer. We simply call it VWSI. VWSI is a simulation program composed of many parameters which have influences on white-light interference fringe. Using VWSI, we predict a physical phenomenon related to white-light interferometer in detail. For example, we easily estimate the change of an interference fringe according to the N.A. of the objective lens or the shift of envelope peak position due to phase change on reflection according to materials. So VWSI is the powerful tool to analyze the influence on the interference fringe according to critical variables such as the N.A. of the objective lens, spectral distribution of source, and phase change on reflection in metals and so on.

서지기타정보

서지기타정보
청구기호 {MME 03025
형태사항 x, 73 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Young-Sik Ghim
지도교수의 한글표기 : 김승우
지도교수의 영문표기 : Seung-Woo Kim
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 71-73
주제 가상의 백색광 주사 간섭계
간섭 무늬
반사시 위상 변화
광원의 주파수 분포
대물렌즈의 개구수
Virtual White-light Scanning Interferometer
Interference fringe
Phase change on reflection
Spectral distribution of source
The N.A. of the objective lens
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