서지주요정보
미소 기전 시스템용 니켈 박막의 기계적 물성 측정 = Measurement of mechanical properties of electroplated nickel thin film for MEMS application
서명 / 저자 미소 기전 시스템용 니켈 박막의 기계적 물성 측정 = Measurement of mechanical properties of electroplated nickel thin film for MEMS application / 백동천.
저자명 백동천 ; Baek, Dong-Cheon
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8013880

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 03038

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Electroplated Nickel manufactured via the LIGA process, offers the possibility of stronger structure and connectors in a micro electro mechanical system (MEMS). In this study, the mechanical properties of electroplated Nickel thin film were characterized using three methods; tension test, bending test, and nano-indentation test. In tension test, a linear guided motor was used and the applied force was measured using a load cell. Strain was measured with a dual microscope that obtains the displacement of two separated points by the tracking process of the image captured with CCD camera. In bending test, force and deflection of micro cantilever beam was obtained with nano-indenter. In indentation test, elastic modulus was measured using a continuous stiffness method. Three types of specimen were prepared in the same wafer and tested after four month of aging, which reduces the variation of properties caused by fabrication condition and aging effect. The tension specimen is 15㎛ in thickness and 300㎛ in width. Cantilever beams are 15㎛ in thickness, 80 to 140㎛ in width, and 300 to 700㎛ in length, respectively. The indentation specimen has thickness of 15㎛. Young’s modulus were measured by three different testing methods and compared quantitatively.

서지기타정보

서지기타정보
청구기호 {MME 03038
형태사항 vii, 70 p. : 삽도 ; 26 cm
언어 한국어
일반주기 부록 : 공정과정(process runsheet)
저자명의 영문표기 : Dong-Cheon Baek
지도교수의 한글표기 : 이순복
지도교수의 영문표기 : Soon-Bok Lee
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 29-30
주제 기계적 성질
전기도금
니켈
나노인덴터
미소 기전 시스템
mechanical properties
electro plated
nickel
nano indenter
MEMS
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