Lasers are used as the source of the interferometers in the industrial field. These lasers need 3 requirements. The first is the narrow linewidth of laser for the long coherence length. The second is the stabilized frequency of laser for the precision measurement. And the last is the high power for the multi-axis measurements and the long range measurements. Now HeNe lasers are mostly used and the frequency stability is about $10^{-9}$. In this paper, we construct the HeNe laser systems of frequency stabilization using typical 2 method, the beat frequency stabilization method and the intensity difference method. So, we get the frequency stabilities of $2.01×10^{-9} (0.1s)$, $3.4×10^{-9} (0.1s)$ But these have the disadvantage of low power. So, we suggest frequency stabilized high power diode laser. For the narrow linewidth, we construct the External Cavity Diode Laser, so the linewidth is 40MHz. Through we construct Fabry-Perot etalon with the zerodur, we carry out the experiment of frequency stabilization using modified PDH method. The frequency stability is $4.96×10^{-9} (0.1s)$. And the optical power is 4 mW.
