서지주요정보
음향 광학 편향기와 슬릿을 이용한 반사형 공초점 주사 현미경의 설계와 성능에 관한 연구 = Design and performance evaluation of reflection confocal scanning microscope using acousto-optic deflector and slit
서명 / 저자 음향 광학 편향기와 슬릿을 이용한 반사형 공초점 주사 현미경의 설계와 성능에 관한 연구 = Design and performance evaluation of reflection confocal scanning microscope using acousto-optic deflector and slit / 이승우.
저자명 이승우 ; Lee, Seung-Woo
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8013897

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 03055

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Confocal scanning microscope(CSM) is very useful tool for measurement in biological field, material science and semiconductor industry because of its providing images with superior resolution and its unique property of optical sectioning. These properties are cause by confocal aperture which prevents out of focus information. In this paper we designed beam scanning optical system for reflection confocal microscope using acousto-optical deflector(AOD). AOD has low diffraction efficiency below 70%, so they cannot be descanned by the AOD. So we collect reflected light from specimen with slit rather than pinhole directly. In beam scanning system the aberration of optical components effect on the performance of CSM, so careful selection of optical components is very important. We propose a method to design a scanning system using the finite ray tracing and diffraction theory and define a cost function which contains the effect of aberration. The design variables are lenses and their locations and determined to minimize the cost function. The lenses are all doublets. We construct the designed system and evaluate its performance. The FHWM which means axial performance of CSM is not changed with deflection angle. We conclude that the beam scanning system is properly designed. And we got some images of specimen with designed reflection confocal scanning microscope.

서지기타정보

서지기타정보
청구기호 {MME 03055
형태사항 vii, 83 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Seung-Woo Lee
지도교수의 한글표기 : 권대갑
지도교수의 영문표기 : Dae-Gab Gweon
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 46-47
주제 공초점 주사 현미경
음향 광학 편향기
슬릿 검출
높이 측정
공초점 주사 현미경의 설계
Confocal scaninng microscope
Acousto optic deflector
Slit detector
Height measurment
Design of confocal scanning microscope
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