서지주요정보
SEM을 이용한 미세접합 및 모니터링 시스템 개발에 관한 연구 = A study on the development of SEM applied microjoining and monitoring system
서명 / 저자 SEM을 이용한 미세접합 및 모니터링 시스템 개발에 관한 연구 = A study on the development of SEM applied microjoining and monitoring system / 황일한.
저자명 황일한 ; Hwang, Il-Han
발행사항 [대전 : 한국과학기술원, 2003].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8013915

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 03073

SMS전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Scanning electron microscopy (SEM) has been used as a surface measurement instrument and a tool for lithography in semiconductor process due to its high density localized beam which makes possible semiconductor structures with sub-micrometer line width. But SEM has not been applied to the area of material process because its power is not enough for that purpose. Considering the conditions provided by SEM such as vacuum condition and on-line process monitoring system, the advantages that can be expected if material processing become possible is great. So in this paper by modifying SEM to increase the amount of current reaching a specimen from gun part where current is generated, the possibility of applying SEM to material processing, especially microjoining, is investigated. The maximum current of SEM after modifications was measured up to 10㎂, which is $10^5$ times greater than before modifications. Through experiments such as eutectic solder wetting on thin stainless steel 304 foil and microjoining of 10um thick stainless steel 304, the intensity of electron beam of SEM proved to be great enough for material processing as heat source. And a tight jig system was found necessary to hold materials close enough for successful microjoining. And by investigating the reactions occurring when electrons with high speed collide with solid material, a reasonable heat source modeling of SEM electron beam was suggested as heat generation within material.

서지기타정보

서지기타정보
청구기호 {MME 03073
형태사항 iii, 75 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Il-Han Hwang
지도교수의 한글표기 : 나석주
지도교수의 영문표기 : Suck-Joo Na
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 74-75
주제 주사식 전자 현미경
미세 접합
SEM
microjoining
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