In this thesis, using developed analysis tool, the characteristics of NFR (Near-Field Recording) system are simulated. The analysis tool includes optical multi-layer analysis, thermal analysis and analysis of magnetization dynamics. To enhance the optical performance of the NFR head, a new design is suggested. The structure uses a lens barrel with an OL (Objective Lens), the SIL and a magnetizing coil in it and a flying slider with a transparent section. The performance and WFE (Wave Front Error) characteristics of the head are evaluated by inspecting its focused beam. The tolerance involved in the NFR head system is calculated, which indicates that it needs some compensation for optical error. The cause of the tolerance in the NFR system is analyzed and the position of the CL (Collimator Lens) is adjusted to loosen the tolerance. To provide guide of the adjustment, in-situ spot-profiling technique is newly introduced and is evaluated.
