서지주요정보
R.F. 마그네트론 스퍼터링법으로 증착한 ITO박막에 작업 압력이 전기적 특성에 미치는 영향 = Effect of the working pressures on electrical properties of ITO thin films deposited by R.F. magnetron sputtering
서명 / 저자 R.F. 마그네트론 스퍼터링법으로 증착한 ITO박막에 작업 압력이 전기적 특성에 미치는 영향 = Effect of the working pressures on electrical properties of ITO thin films deposited by R.F. magnetron sputtering / 전용선.
발행사항 [대전 : 한국과학기술원, 2002].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8013532

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 02043

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

Tin-doped indium oxide(ITO) thin films were deposited on corning glass #1737 substrates by R.F. magnetron sputtering at 100℃ using an $In_2O_3$-10wt%Sn ceramic target. Argon was introduced near the substrate. The films were deposited in the working pressure from 2mTorr to 10mTorr. The resistivity was varied with working pressures. It was the lowest at the point of 2mTorr. Hall effect measurement analysis were done to understand the variation of the sheet resistance. It was found that carrier mobility is a dominant factor for controlling the sheet resistance more than the carrier concentration in the optimum range. The intrinsic stress with working pressures at the lower substrate temperature(100℃) were analyzed by X-ray diffraction method. Intrinsic stress was the highest compressive stress in the 2mTorr. It was explained by atomic bombardment effect. GIXR(grazing incidence X-ray reflectivity)method was used to investigate the variation of the density at 100℃. The density was near the theoretical density in the 2mTorr, and 6.86g/㎤. In this study, it was found that the resistivity of the ITO thin films at low temperature was depended on atomic bombardment effect by working pressure control. But we could not obtain ITO films of low resistivity($∼10^{-4}Ω·cm$) at 100℃.

서지기타정보

서지기타정보
청구기호 {MMS 02043
형태사항 iii, 57 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Yong-Seon Jeon
지도교수의 한글표기 : 최시경
지도교수의 영문표기 : Si-Kyung Choi
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 55-57
주제 산화 주석 박막
저온 증착
Indium Tin Oxide
low temperature deposition
QR CODE qr code