서지주요정보
효율적 정전기장 계산을 통한 MEMS구조물 해석에 대한 연구 = A study on the effective computational algorithm for electrostatic field for the analysis of MEMS structure
서명 / 저자 효율적 정전기장 계산을 통한 MEMS구조물 해석에 대한 연구 = A study on the effective computational algorithm for electrostatic field for the analysis of MEMS structure / 안재열.
저자명 안재열 ; Ahn, Jae-Yul
발행사항 [대전 : 한국과학기술원, 2002].
Online Access 원문보기 원문인쇄

등록번호

8012780

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 02037

도서상태

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#### 초록정보

An iterative method using FEM and BEM for the analysis of electrostatic field and structure interaction problems is presented. For the analysis of electrostatic field problem, it is often required to discretize the air-space surrounding the conductors. In the case, if the space is to be discretized only by finite elements, the number of d.o.fs of the problem significantly increases thereby reducing computational efficiency. In this reason, BEM is used for the analysis of electrostatic field. The surrounding unbounded space is treated by the BEM and structure bodies are described by the FEM. First, BEM domains can be solved with electric potentials as a boundary condition. Using electrostatic force obtained in the BEM calculation, FEM domain can be solved. The electrostatic force and structure deformation are updated at each step. The iteration can be ended when the solutions are converged. The matrix obtained in FEM can be solved fast because the matrix is symmetric. In BEM part, we used a generalized conjugated residual iterative algorithm with a multipole approximation for the efficient calculation. In the matter of the electrostatic problems, the reference potential have to be considered to obtain the charge distribution exactly. This consideration for the reference potential have an important meaning about the principle of conservation of charge. In this paper, the method to consider the reference potential is proposed. Using linear properties of the electrostatic field problem, the reference potential can be obtained by several operations. Several numerical example problems are solved to demonstrate the verification of the scheme. For the analysis of a electrostatic field and structure interaction problem, the effectiveness of the multipole expansion algorithm considering the reference potential is demonstrated by solving two real problems.

#### 서지기타정보

청구기호 {MME 02037 viii, 76 p. : 삽도 ; 26 cm 한국어 저자명의 영문표기 : Jae-Yul Ahn 지도교수의 한글표기 : 윤성기 지도교수의 영문표기 : Sung-Kie Youn 학위논문(석사) - 한국과학기술원 : 기계공학전공, 참고문헌 : p. 38-39 정전기장 경계요소법 다중극근사방법 기준전위 초소형정밀기계시스템 Electrostatic field BEM Multipole expansion algorithm reference potential MEMS
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