서지주요정보
간섭 무늬 최대점 이동량의 감지를 이용한 초정밀 변위 측정 시스템 = High precision displacement measuring system using the detection of fringe peak movement
서명 / 저자 간섭 무늬 최대점 이동량의 감지를 이용한 초정밀 변위 측정 시스템 = High precision displacement measuring system using the detection of fringe peak movement / 이종훈.
저자명 이종훈 ; Yi, Jong-Hoon
발행사항 [대전 : 한국과학기술원, 2001].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8012510

소장위치/청구기호

학술문화관(문화관) 보존서고

DME 01048

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

Optical interferometers are most widely used in precise displacement measurements, such as semiconductor metrology and lithographic applications, for their capability of obtaining sub-micrometer resolution and non-contact measurements. In optical interferometry, the measured physical quantities are encoded in the phase of interference or fringe patterns. Many techniques, extracting the phase information from the interference patterns, have been proposed to improve the performance and accuracy of interferometers measuring linear displacement. However, these techniques inherently include the nonlinearity and systematic errors of optical interferometers. Hence, to measure the displacement with nanometric resolution, these error sources have to be identified and corrected. We propose a new signal processing algorithmm, extracting the phase information from the spatial interference pattern, for precise displacement measurement. The configuration of the proposed system is similar to Twyman-Green interferometers except that the reference mirror is slightly tilted to generate equally-spaced fringes. This method is to measure the fringe movement by detecting the fringe peak positions which are linearly proportional to the displacement of an object. The system acquires an image of interference fringes on the CCD to find fringe peak positions and traces the fringe movement to obtain the displacement of the target mirror. The peak position is determined by fitting the intensity signal to the quadratic curve around the peak positions. This study shows a simple method capable of detecting the fringe movement from the fringe peak positions. Also, we present the analysis of error occurred in the proposed method and propose the compensation method for the major error sources.

서지기타정보

서지기타정보
청구기호 {DME 01048
형태사항 viii, 103 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Jong-Hoon Yi
지도교수의 한글표기 : 곽윤근
지도교수의 영문표기 : Yoon-Keun Kwak
수록잡지명 : "A nanometric displacement measurement method using the detection of fringe peak movement". Measurement science and technology, v.11, pp. 1352-1358 (2001)
학위논문 학위논문(박사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 98-103
주제 변위측정
간섭무늬 최대점
레이저 간섭계
최소자승법
Displacement Measurement
Fringe Peak
Laser Interferometer
Least-square algorithm
QR CODE qr code