서지주요정보
곡률측정법을 이용한 점탄성 박막의 잔류응력에 관한 연구 = A study on residual stress in viscoelastic thin film using curvature measurement method
서명 / 저자 곡률측정법을 이용한 점탄성 박막의 잔류응력에 관한 연구 = A study on residual stress in viscoelastic thin film using curvature measurement method / 임영태.
저자명 임영태 ; Im, Young-Tae
발행사항 [대전 : 한국과학기술원, 2001].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8012404

소장위치/청구기호

학술문화관(문화관) 보존서고

MME 01073

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

초록정보

Thermal deformation takes place when a polyimide(PI) film, which is a common dielectic material used in electronic devices, is cooled down to a room temperature after being coated on silicon(Si) substrate at high temperature. This phenomenon is due to CTE difference between PI and Si, and this thermal deformation results in thermal stress. The thermal deformation and its induced thermal stress have a negative effect in manufacturing process and sometimes cause the structure to fail. In this study, the thermal deformation is measured by a curvature measurement method using laser scanning, and the residual stress is calculated by an analytic model. Since PI film shows visco-elastic behavior, the modulus of the film varies with time and temperature, we analyze the residual stress by measuring the relaxation modulus of the PI film, taking into account the visco-elastic behavior of the PI film. From the comparison between the measured value and the elastic solution, we find that the residual stress in PI film has relaxed by an amount of 6.4% at 100℃ and 8.8% at 150℃ two hours after manufacturing.

서지기타정보

서지기타정보
청구기호 {MME 01073
형태사항 v, 46 p : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Young-Tae Im
지도교수의 한글표기 : 엄윤용
지도교수의 영문표기 : Youn-Young Earmme
학위논문 학위논문(석사) - 한국과학기술원 : 기계공학전공,
서지주기 참고문헌 : p. 45-46
주제 잔류응력
곡률측정법
박막
점탄성
응력완화
residual stress
curvature measurement method
thin film
viscoelastic
stress relaxation
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