서지주요정보
RF PE-CVD 법에 의한 탄소나노튜브의 대면적, 저온성장 및 그 표면 구조와 전계 방출 특성에 관한 연구 = Growth of carbon nanotubes at low temperature on glass substrates of large area by RF plasma-enhanced chemical vapor deposition and analysis of their surface structure and field emission property
서명 / 저자 RF PE-CVD 법에 의한 탄소나노튜브의 대면적, 저온성장 및 그 표면 구조와 전계 방출 특성에 관한 연구 = Growth of carbon nanotubes at low temperature on glass substrates of large area by RF plasma-enhanced chemical vapor deposition and analysis of their surface structure and field emission property / 정연식.
발행사항 [대전 : 한국과학기술원, 2001].
Online Access 원문보기 원문인쇄

소장정보

등록번호

8011811

소장위치/청구기호

학술문화관(문화관) 보존서고

MMS 01032

휴대폰 전송

도서상태

이용가능

대출가능

반납예정일

리뷰정보

초록정보

Since their discovery in 1991, carbon nanotubes have excited many researchers owing to their amazing electrical and mechanical properties. They have various applications such as tip material for field emission devices and scanning probe microscopy, intercalation material for Li ion battery, storage material for hydrogen gas, and so on. But many technical problems are also remained because it's not easy to control them due to so small size of them. Moreover, to commercialize them would not become active, until the techniques for large-scale and low-cost synthesis are developed. In this study, large-area and low-temperature synthesis of carbon nanotubes on glass substrates with TCP (Transformer Couple Plasma) type rf PE-CVD system was performed, and their surface structures and field emission property were also analyzed. TCP systems have simple structures but can generate high-density plasma and also large area and uniform processes are possible with them. By varying process conditions such as Ni layer thickness, gas flow rate, $NH_3$ etching time, plasma power, the distance between rf coil and substrate, best conditions for growing carbon nanotubes were found. Their SEM and TEM images showed that their diameters are ranged form 40 nm to 80 nm and they have hollow tube structures. From the FTIR spectrum of carbon nanotubes synthesized in this study, large amount of $-CH_2$ and $-CH_3$ functional groups were detected and XPS peak of $C_1s$ was split into one main peak and several small peaks and that means the chemical state of carbon atoms is divided. Their surface structures were proposed from the FTIR spectrum and the XPS results and they are thought to be somewhat different from those of arc-discharge samples. Measured field emission current density seems to be sufficient to be used for field emission display and increased with carbon nanotube growth time. With this results and equivalent circuit modeling, body-emission was confirmed to be dominant emission mechanism.

서지기타정보

서지기타정보
청구기호 {MMS 01032
형태사항 iv, 68 p. : 삽도 ; 26 cm
언어 한국어
일반주기 저자명의 영문표기 : Yeon-Sik Jung
지도교수의 한글표기 : 전덕영
지도교수의 영문표기 : Duk-Young Jeon
학위논문 학위논문(석사) - 한국과학기술원 : 재료공학과,
서지주기 참고문헌 : p. 66-68
주제 탄소나노튜브
플라즈마 화학 기상 증착법
전계방출
carbon nanotube
PE-CVD
field emission
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